Can nanoprobing affect the transistor characteristics/behavior?
Nanoprobing is non-destructive to the transistor. However, if the voltage or current levels are applied beyond the transistor’s normal operating conditions then the transistor can be stressed and possibly damaged. However, the voltage/current can be set / controlled thru the Zyvex system to ensure that they are well below the range that would damage the transistor. There are other techniques like Scanning Capacitance Measurement, Reactive Ion Etching, and Focused Ion Beam Milling that may weaken devices and result in damage prior to nanoprobing. Since these are not part of SEM nanoprobing, they should not be used in conjunction with SEM nanoprobing.
