Can IPUP pumps be used for all semiconductor processes?
From a pumping standpoint, the semiconductor processes can be divided into two categories of clean and non-clean process chemistries. The L model IPUP is used for clean processes. The P model IPUP is used for non-clean processes. Both L and P models have the same physical dimensions. The P model is equipped with nitrogen purge, temperature regulation, chemically resistant seals and secondary ventilation. So the answer is yes, IPUP pumps can be used on all semiconductor processes but L models must be used for clean applications and P models must be used for non-clean applications.
