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Can I upgrade my SUNALE™ R-series ALD process tool later on with a substrate loader?

April 26, 2017ALD later loader process r-series Substrate Tool upgrade

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Can I upgrade my SUNALE™ R-series ALD process tool later on with a substrate loader?

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Normally SUNALE™ R-series ALD process tool is equipped with a pneumatic lift, which opens the reaction chamber to atmosphere for quick wafer loading. We have two optional wafer loader options available for R-series ALD process tools. The options are manual and semi-automatic substrate loader. Both options are equipped with a load lock and a gate valve.