At what temperature is thermal oxide grown?
Q: What is the difference between Dry Thermal Oxide and Wet Thermal Oxide? A: Wet thermal oxide is grown using heat and water vapor, whereas Dry Thermal Oxide is grown with heat and oxygen. Wet Thermal Oxide grows at a much faster rate than Dry Thermal Oxide. Because of the increased growth rate, Wet Thermal Oxide is the preferred method for growing thicker oxides. Dry Thermal oxide is typically a denser oxide than Wet Thermal Oxide.
