Are there performance differences between PMMA resists formulated in chlorobenzene and those formulated in anisole?
It depends upon your process requirements. In most cases PMMA formulated in anisole will have virtually identical performance characteristics as with PMMA formulated in chlorobenzene. However, if the PMMA resist is placed on top of another resist, such as a DNQ based positive resist, the anisole resist may attack (intermix with) the underlayer more readily than with a chlorobenzene based PMMA resist. For more comparative data between PMMA in anisole and PMMA in chlorobenzene, please refer to the following paper, which can be obtained from our PMMA home page. Characterization of safe solvent PMMA resist variables for electron beam applications. Bruce W. Smith, Todd D. Eakin, Rochester Institute of Technology and Donald W. Johnson, MicroChem Corp., 90 Oak St., Newton, MA 01464.
