Are there advantages to using EX-Q sensors versus through-beam?
Yes. EX-Q sensors provide the same consistent, robust detection of through-beam sensors, without requiring gain adjustments. However, EX-Q sensors also detect thin wafers that can “hide” in the beam of through-beam sensors and therefore can be missed. The EX-Q is a non-intrusive mapping solution with a range of standoff distance options that provide setup flexibility. The sensor contains no moving parts that can cause particulate contamination. The EX-Q is quick and easy to implement, eliminating the time-consuming design cycles that may be required for through-beam solutions. The same EX-Q sensor can also be used to detect wafers of all sizes and reflectivity, without requiring any change to the overall setup. EX-Q sensors provide setup flexibility working with both on- and off-axis scans.
