Are the mass flow controllers accurate all the way down to zero flow?
The mass flow controllers are rated for +/- 1% full-scale flow from 2% to 100% of the calibrated full-scale flow. If a wider range is required, multiple mass flow controllers for a single gas may be added for ‘range control’. As an example, a 100 lpm mass flow controller is only accurate down to 2 lpm so it may be desirable to also include a 5 slpm mass flow controller in parallel.
Related Questions
- How accurate does the quantity check / mass balance on traceability need to be as specified in clause 3.9.2?
- What full-scale flow ranges are available for the mass flow controllers in the Gas Metering unit?
- What are the "wetted parts" of Bronkhorsts gas / liquid mass flow meters & controllers constructed of?
