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Are different configurations and/or setups required depending on the type of wafer being mapped?

April 26, 2017configurations depending different mapped setups type wafer

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Are different configurations and/or setups required depending on the type of wafer being mapped?

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No. When presented with cassettes or FOUPs of wafers with different characteristics, EX-Q wafer mapping sensors do not require any setup or adjustment changes. The EX-Q will work for both on- and off-axis scans of 150 mm, 200 mm and 300 mm wafers.