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How smooth are the UNCD films?

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How smooth are the UNCD films?

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UNCD films are typically very smooth as deposited on silicon (Si) wafers, because standard Si wafers are nanometer-level smooth. For instance, UNCD Aqua 25 films have RMS roughness values around 10 nm on standard Si wafers. The roughness of the film depends on a number of factors: the roughness of the substrate, the thickness of the UNCD layer and the chosen UNCD product.

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