What is an ozone destruct unit?
An ozone destruct unit is used to catalytically destroy excess ozone gas produced in an ozonation process. These processes include: 1. Offgas from an ozone contacting tank 2. Excess ozone produced in a CVD process 3. Exhaust from an ozone analyzer Although ozone gas is unstable and will thermally decompose on its own, it is often advantageous to destroy it more rapidly.
