How does AVS measure vibrations?
AVS uses three MEMS (microelectromechanical) to measure the acceleration of orthogonal axis of the wafer. Each of the three MEMS devices measures the differential capacitance of a moving proof mass placed between fixed electrode plates of opposite polarity. The capacitance changes in response to changes in acceleration. The differential capacitance of the three electrodes is measured by an analog-to-digital converter. Proprietary technology is used to accurately convert the MEMS readings to accelerations expressed in terms of earth’s gravity.
