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How reliable is the Multibeam MEBIC?

April 26, 2017multibeam

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How reliable is the Multibeam MEBIC?

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The MEBIC is designed for reliability and consistency. The system has only a few mechanical moving parts, including the low-speed wafer stage. The system automatically calibrates at the start of each run to insure consist patterning throughout its life. Multibeams Schottky Thermal Field Emitter (TFE) electron sources wear out (exhausting a reservoir containing zirconium-oxide) extremely slowly and are replaced annually during scheduled maintenance.