How are the precursor lines of SUNALE™ ALD tools designed?
In properly designed ALD reactors like SUNALE™ ALD process tools, the precursor lines are separated all the way from source container to the reaction chamber. This enables precursor pulsing without possible precursor cross-reaction and cross-contamination issues. Also unwanted CVD-type growth could easily happen, if the precursors would share the same line. The precursor lines of SUNALE™ ALD tools have individual mass flow controllers for accurate and highly repeatable processing. They also have individual pressure gauges for pulse pressure monitoring. The precursor lines are very short to enable quick delivery of precursors to the reaction chamber. Our ALD tools are cleverly designed to avoid precursor condensation without extra line heaters. This unique combination of features ensures that the design of our products is evidently the best on the market.
