Why Use Sapphire for Wafer Carriers?
Reasons for using sapphire for wafer carriers include: Superior chip resistance Chemically resistant to all reagents used in processing Scratch resistant. Harder than any other optical material except diamond. Transparent Durable. Withstands repeated use and handling Best coefficient of thermal expansion match to GaAs. Insaco has also developed unique capabilities to fabricate wafers with one or more circular recesses; to serve as holder for other wafers. This includes single recess in the center as well as, for example, four 2 recesses in a single 6 carrier. The key is keeping the recess flat and parallel, and perhaps also polished. This is where innovation was required, and we are able to offer flat and parallel recesses to .0001 (2.5 micron).
